UV-Illuminated Buried-Type Optical Waveguide Devices on Benzocyclobutene

Buried-type benzocyclobutene optical devices fabricated by UV-illumination are presented. The refractive index can be accurately controlled between 0.001 and 0.0038 by the proposed method. Experimental results show directional couplers and 1times2 multimode interference power splitters can be fabricated with high accuracy and good controllability.