Monitoring the evaporation of femtoliter droplets with CMOS integrated nanomechanical mass sensors

We present a time-resolved study of the evaporation in air of minuscule sessile droplets deposited by nanodispensing techniques. Nanomechanical resonators are used to determine the time evolution of the mass of liquid droplets with high precision. We have studied the evaporation of droplets with diameters in the one micron range, which corresponds to volumes in the femtoliter range, nine orders of magnitude smaller than previously published data.