Extraordinary Transmission Through A Poly-SiC Membrane with Subwavelength Hole Arrays

We report on the experimental observation of extraordinary transmission (~50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.