Fluid Model of an Electron Cyclotron Wave Resonance Discharge

A fluid model of a planar electron cyclotron wave resonance argon discharge is presented. The results for a 15-mtorr argon discharge are checked against the particle in cell/Monte Carlo (PIC/MC) simulation results by R. Krimke
et al
. and are also compared to the analytical theory and experimental data by B. Pfeiffer. The application of a specific boundary condition for the magnetic potential, the use of an effective electron collision frequency that includes plasma nonuniformities, and the coupled solution of the electrostatic field were found to be essential parameters leading to the agreement of the fluid code with both experimental and PIC/MC findings.