A Ta2O5 solid-electrolyte switch with improved reliability

We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replace a former solid electrolyte of Cu
₂
S with Ta
₂
O
₅
, which has a Si-process compatibility, . As a result, we successfully control the turn-on voltage to adapt to CMOS operation. The Ta
₂
O
₅
-NanoBridge exhibits a high reliability of cycling endurance (>10
⁴
) and a stability against EM (>10 years at 2.6 mA at RT). Furthermore, we demonstrate that the conducting path of the switch is a Cu precipitate with 30 nm in diameter, which possibly enables to scale down the switch.