Low ß Ion Acceleration with the FOM Meqalac-System

The FOM MEQALAC (Multiple Electrostatic Quadrupole Array Linear ACcelerator) system in which four He+ ion beams of 2.2 mA are accelerated from 40 to 120 keV is discussed. The cavity has a modified Interdigital H structure (TE111). In between the 20 acceleration gaps electrostatic quadrupole lenses are placed to achieve radial stability of the beams. Some fundamental considerations concerning the design of MEQALAC systems are presented. Furthermore, parameters for plasma diagnostics and ion implantation accelerators are given.