Characterization of Semiconductor Materials by Charged Particle Activation

Results obtained during the past few years by research groups working on joint projects, mainly in view of a better knowledge of GaAs, are summarized here. The procedures of radioactivation analysis with charged particles (deuterons and tritons) are described to some extent. Finally, some important aspects of charged particle activation analysis, namely : calibration, etching after irradiation and diffusion during irradiation, are discussed.