Low Vibration Sensitivity MEMS Resonators

It is well known that the stability of crystal oscillator references is undermined in high-g environments [1,2]. This can result in failure of communications systems relying on the crystal as a frequency reference. Lower vibration sensitivity is theoretically achievable by replacing the crystal with a micro electromechanical (MEMS) resonator. In this paper we present an electrostatically actuated Lamé resonator that has vibration sensitivity (0.91 ppb/g) comparable to the best high-g insensitive crystal oscillators.