Miniaturised Flexible Temperature Sensor

We propose a microfabrication technology for a flexible temperature sensor with a 100×100 μm
²
sensing area and a probe length of 7 cm. We use a biocompatible new high temperature-resistant polyimide (U-Varnish-S, Ube, Düsseldorf, Germany) to embed a thin film platinum resistor as sensing element. The sensor is operational from 0°C up to 400°C with an accuracy of ±1°C at high temperatures and has a time constant of 0.05 seconds. This sensor was designed for temperature characterisation of hot steam injected for thermo-ablation of tumours via a micro-needle.