Liquid-Phase Biochemical Sensing with Disk-Type Resonant Microsensor

The application of a resonant microsensor platform based on disk-type microstructures vibrating in an in-plane resonance mode for biochemical sensing in liquid environment is described. Based on the measured short-term frequency stabilities of 1.1 10
^-8
in air and 2.3 10
^-6
in water, low femtogram and sub-picogram detection limits can be achieved in air and in liquid, respectively. The feasibility of liquid-phase biosensing using the disk resonators is demonstrated experimentally by detecting anti-beta-galactosidase antibody using covalently immobilized beta-galactosidase enzyme.