Research on Principle and Phase of Silicon Micromachined Gyroscope Using for Rotating Carrier

The principle and phase picking-up technique of silicon micromachined gyroscope using for rotating carrier is proposed in the paper. Be differ from conventional gyroscope, this one hasn't self-driver part and the configuration is simple. According to the principle of the gyroscope, when the sensitivity axis parallel to the deflexion plan, silicon pendulum will get the biggest Coriolis force, and the output is the peak value of the sine wave; when the sensitivity axis perpendicularity to the deflexion plan, the output is the zero value of the sine wave. So taking the input signal of the gyroscope as the benchmark, we will get the direction of the sensitive axis by comparing the output signal phase in benchmark coordinate. Moreover we can confirm the circumrotating plan and the deflexion direction of the rotating carrier in the space.