The Development of Model for Parameters for MEMS Operating Reliability Determination

Reliability is a critical issue in any industrial and consumer product development. The products using MEMS technology is no exception. The central issue of reliability is that no matter how sophisticated a product is designed and manufactured, it becomes useless if it fails to deliver the designed performance during the expected lifetime. In this paper, the mathematical model for determination of MEMS reliability parameters is presented. As an example a micro device consisting of n sensors, n information processing channels and n actuators. Reliability of this system depends on reliability of all its elements.