High response time micro scale thermo-couple for biological applications

We describe the design and manufacture of a thin film thermo-couple (TFTC) which is intended for real time observations of temperature-dependant phenomena of biological systems. The TFTC design aims at shortening its response time. The TFTC manufacturing process combines platinum, silica and chromium sputtering with reactive ion etching (RIE) on glass substrate. Our device consists of a platinum wire (the heater) near a micro TFTC sensor. This sensor consists in two wires made of platinum and chromium. These wires are in contact on a
2×2μm
area. Our micro TFTC shows a simulated response time of 0.35 ms when used in air (for Δ≈58K), and 1.5ms when used in water (for Δ≈41K).