One Novel Design Method of the Millimeter-wave MEMS Filter

In this paper, one novel design method is presented for millimeter-wave Micro-Electro-Mechanical-Systems (MEMS) filters based on Finite Element Method(FEM), which results are validated by comparison to the traditional FDTD method. Moreover, one MEMS filter's design and fabrication flow are studied, and some significant academic analyzing and engineering application are obtained, which is helpful for millimeter-wave miniature passive devices design using MEMS fabrication technology.