Non-Toxic Liquid-Metal 2-100 GHz MEMS Switch

In this paper, the first wide-band MEMS capacitive switch using non-toxic liquid metal, Galinstan, is reported. Controlled movement of Galinstan in a micro-channel alters the impedance of a coplanar waveguide (CPW) line from 50Ω (off-state) to an effective RF short circuit (on-state). The RF short circuit in particular is achieved when a slug of Galinstan capacitively connects the center conductor with the ground planes of the CPW line. Galinstan is reliably manipulated by surrounding it with Teflon solution. Because of Teflon, no residual liquid metal is observed when Galinstan moves. In addition, the Teflon solution has insignificant RF loss and therefore does not adversely affect the switch loss in its off-state even up to 100GHz. The insertion loss of the switch is measured at 0.2, 0.7 and 1.3dB at 20, 40 and 100GHz respectively and is mainly due to the 1500
μ
m long transmission line. The on-state shunt capacitance is measured to be 4pF which results in an on-state isolation of greater than 20dB from 20 to 100GHz.