Study of a cantilevered actuator driven by magnetostriction in low magnetic field

A cantilevered actuator is fabricated in this study by sputter deposition using amorphous Fe
₇₂
Si
₁₄
B
₁₄
as the magnetostrictive material. The displacement of the cantilever is observed with applying the magnetic field of 10 kA/m to the width direction of the cantilever. Results show that the displacement of the cantilever increased with decreasing substrate thickness, and has a peak value at the thickness of the magnetic thin film of 0.5 mum when the substrate thickness is 7.5 mum.