Magnetic properties of nanocrystalline and amorphous FeCoC thin films

In this paper, FeCoC films have been prepared by a reactive sputtering process. Acetylene (C₂H₂) gas, incorporated with argon gas was introduced into the chamber during the sputtering process. The carbon composition in the film can be controlled in a wide range by this process. The magnetic, crystallographic and microstructure of the films have been characterized. Films with 4piM_s of 23.5 kG, the coercivity in hard axis and easy axis of 1.3 Oe, and the electrical resistivity of 120 muOmega-cm have been prepared.