Characterization of Core Materials for Microscale Magnetic Components Operating in the Megahertz Frequency Range

Suitable materials forming the core of microscale magnetic components have been characterized for the application of magnetic passive components in the 0.5-10 MHz frequency range. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom-made solenoid microinductor. Inductance values ranging from 0.3 to 120 H with component power efficiency above 90% have been measured. Although the present inductor, at 500 kHz, achieves 77% power efficiency for 24.7W/cm
³
power density, an optimized process predicts a power efficiency of 97% for 30.83 W/cm
³
power density.