An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a Flip-Chip Extended 0.13μm CMOS Technology

A 0.13μm CMOS chip is fabricated with eight resonator-amplifiers to demonstrate a highly integrated gravimetric sensor based on an FBAR oscillator. The oscillator is attached via flip-chip bonding to a CMOS resonator. Each active 1.86GHz oscillator draws 27mA from a single 17V supply for 200×200μm
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sensors. The resonance frequency shifts by 5MHz in ethanol and 7.3MHz in water and jitter is <3kHz