Miniaturization of Magnetic Resonance Microsystem Components for 3D Cell Imaging

Magnetic resonance components, including gradient coils and RF coils, are miniaturized using a MEMS batch fabrication process and are combined with a 0.18mum CMOS RF transceiver front-end to implement a compact imaging system. The system aims for a resolution of 6times6mum
²
in a 120 μm slice. The system could replace high-cost MRI counterparts for micron-resolution 3D images of live cells and enable a desktop cellular MRI system.