Investigation of Magnetostrictive Microdevices

This paper presents a method to model magnetostrictively activated surface acoustic wave devices with a commercially available finite element analysis package. Flexural and surface wave modes were identified by simulation of the frequency response. Devices with parallel strip electrodes were fabricated. The device performance was experimentally determined by two different measurement methods. The surface displacement was monitored via laser vibrometry and the impedance measured using a network analyzer. Both procedures showed resonances at similar frequencies. In addition, the surface modes excited in the real devices agree with the resonant frequencies found from the model