A Novel Micro/Nano Electromechanical Actuator with Integral Electrodes

A novel electromechanical actuator (patent pending) is presented, based on the beam-like deformation of two parallel electrodes, both mounted together in the same device and with a small gap in between. It avoids the need of an actuator electrode placed on the substrate. Simulations, mainly performed with ANSYS, have been performed to obtain the performance of the actuator in static conditions. They show that 2D FEM models can be used with a reasonable accuracy. 3D models has to be more thoroughly developed, although a more realistic structure can be simulated, taking into account the electrical connection of the actuator electrodes . A simple analytical model has also been developed in order to estimate the static displacement of a beam with as many actuator electrodes as possible on top of it. The model is useful for a first estimation of device deformation. The working principle of the device is in this paper demonstrated by simulation, until future measurements are possible.