Proposal of Novel Absolute-Humidity Sensing Method using a Pair of Diode-Thermistors and a Micro-Heater on a Micro-Air-Bridge

Novel absolute-humidity sensing method using a pair of diode-thermistors, Th-A and Th-B, and a micro-heater, formed on a micro-air-bridge (MAB), and using the double pulse heating is proposed. Principle of this absolute-humidity sensor is based on the thermal conductivity change in humid air depending on the absolute humidity D. In the first experiment temperature decreases in the various saturated absolute humidity Ds due to the thermal conductivity changes are clearly observed by pulse heating up to above 200degC.