Integration of Vertically Aligned Carbon Nano Fibers with CMOS Integrated Circuits for Sensor Applications

This paper describes the integration of vertically aligned carbon nanofibers (VACNF) with the CMOS integrated circuits fabricated with commercial CMOS processes. The growth temperature of VACNF is about 700degC (Merkulov et al., 2001) which is well above the maximum operating temperature of CMOS circuits. In order to integrate VACNF with CMOS circuits, a method is described to transfer the separately grown VACNF onto the CMOS circuit