Integrated Bandpass Filter at 77 GHz in SiGe Technology

The implementation and characterization of an integrated passive bandpass filter at 77GHz is presented. A lumped elements filter occupying very small die area (110times60mum
²
, without pads) is demonstrated. It is realized with spiral inductors and metal-insulator-metal capacitors. The filter is fabricated in an advanced SiGe:C technology. It has a center frequency of 77.3GHz and a bandwidth of 12GHz. The insertion loss is 6.4dB. This is the first time that integrated inductors are used for filters at millimeter wave frequencies around 80GHz