Design of a Novel MEMS IDT Dual Axes Surface Acoustic Wave Gyroscope

The configuration of a novel microelectromechanical systems (MEMS) interdigital transducer (IDT) dual axes surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing number of gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and MEMS gyroscopes can't meet the demand. Although the MEMS IDT SAW gyroscope previously is without a suspended structure, it can detect only one axis angular velocity, and two are need to measure the angular velocity of two axes which can be detected by a MEMS IDT dual axes SAW gyroscope. The configuration and working principle of the gyroscope are explored. The 95.9 MHz gyroscope sample fabricated on 128deg YX LiNbO
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was primarily designed.