P1K-5 High Sensitivity Pressure Sensor in the range [0-100mTorr] based on Surface Acoustic Wave Device

In this paper, we present the first results of a new measurement method using SAW devices as pressure sensor. This method allowed us to reach a threshold precision better than one mTorr at low pressure. Sensibilities of 28 ppm/mTorr have been commonly achieved in the range [0-10 mTorr]. The stability and the repeatability of the measures have been checked. A patent is pending detailing the basic principles of the method. Thus only experimental results are presented here. A discussion about the industrial applicability of that new sensor concludes the paper