Investigations on an Integrated Optical Position Detection of Micromachined Scanning Mirrors

The micro scanning mirrors developed at the Fraunhofer Institute of Photonic Microsystems (IPMS) are a mechanical resonant, electrostatic driven system. The knowledge of the current deflection angle of the mirror plate is necessary to provide stability of the oscillation and to get information about the direction and amplitude of the deflection. Therefore several designs of miniaturized position detection have been developed