Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques | IEEE Conference Publication | IEEE Xplore

Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques


Abstract:

Finite Ground Coplanar (FGC) waveguide transmission lines on CMOS grade silicon wafer (ρ<0.01 ohm-cm) with a thick embedded silicon oxide layer have been developed using ...Show More

Abstract:

Finite Ground Coplanar (FGC) waveguide transmission lines on CMOS grade silicon wafer (ρ<0.01 ohm-cm) with a thick embedded silicon oxide layer have been developed using micromachining techniques. Lines with different lengths were designed, fabricated and measured. Measured attenuation and s-parameters are presented in the paper. Results show that the attenuation loss of the fabricated FGC lines is as low as 3.2 dB/cm at 40 GHz.
Date of Conference: 02-10 October 2003
Date Added to IEEE Xplore: 02 April 2007
Print ISBN:1-58053-834-7
Conference Location: Munich, Germany

References

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