A Micromachined Evanescent Mode Resonator

An evanescent mode resonator can be micromachined into miniaturized high Q resonators to be used in communication filters that can be integrated in a planar environment The evanescent mode resonator has performance comparable to a micromachined cavity resonator with the advantage of one tenth the size, easier integration into a filter, and excellent rejection of any higher order periodic resonance. This comes at the cost of sensitivity to fabrication tolerances that requires electronic tuning.