Abstract:
This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic sprin...Show MoreMetadata
Abstract:
This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. Such a micro-electro-mechanical system (MEMS) based capacitive energy converter is able to provide an output power of 4.28 muW at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s2 (0.2 g). This corresponds to a power density of 79.26 muW/cm 3 based on a typical MEMS die size
Published in: 2006 European Solid-State Device Research Conference
Date of Conference: 19-21 September 2006
Date Added to IEEE Xplore: 12 February 2007
Print ISBN:1-4244-0301-4
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