Ionizing Irradiation Effect of Fluorine Implanted Metal-BOX-Silicon Structure Based on SOI

Ionizing irradiation effects on MBS (metal-BOX-silicon) have been studied in this paper. Through pre- and post-irradiation high-frequency (HF) C-V curves of MBS of several samples in which fluorine was implanted into BOX of SIMOX, it was found that PD fluoridated SIMOX is beneficial to harden buried oxide layer