Integrated four-channel Mach-Zehnder multi/demultiplexer fabricated with phosphorous doped SiO/sub 2/ waveguides on Si

An analysis and the device performance of an integrated optical 4-channel multi/demultiplexer based on Mach-Zehnder interferometers elements are presented. The channel spacing is 77 AA. Single-mode channel waveguides are made from P-doped SiO/sub 2/ core layers. Waveguide losses as low as 0.05 dB/cm and fiber-to-waveguide butt coupling as low as 0.5 dB for lambda =1.5 mu m have been obtained. The multiplexer transfers power from four input channels into a common output channel with an average fiber-to-fiber loss of 2.6 dB per channel. The average crosstalk of the demultiplexer is -16 dB.<
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