Detection of Hot Electron-Induced Radiation Damage in Organic Dielectrics by Exoelectron Emission from Thin Films

Charge trapping in thin dielectric films on metal substrates is investigated by thermally and optically stimulated exoelectron emission. The techniques are used to detect hot-electron-induced chemical degradation of hydrocarbon films. Radiation-induced electron traps are found if the films are irradiated with hot electrons above a threshold energy of 3.5 to 4 eV.