A Decoupling Method for Serial Twin Linear Slider System with Machine Stand Vibration

In this paper, we propose a decoupling method for a serial twin linear slider system with a machine stand vibration. In the decoupling, we introduce a transfer function which can be designed arbitrarily by a desired decoupled model. One of designed examples of the transfer function is shown, and the effectiveness is demonstrated by two experiments. As a result, it is obtained that a positioning accuracy of the sliders can be improved by a decoupling method proposed here