Fabrication of Alloy FeCoPt Particles by IBICVD and Their Characterization

Ion beam induced chemical vapor deposition (IBICVD) has been for the first time successfully applied for direct patterned deposition of ternary alloy FeCoPt particles. Magnetic force microscopy (MFM) studies revealed existence of the magnetic ring domain structure in annealed particles. Fabricated FeCoPt particles exhibit soft ferromagnetic properties. It was found that coercivity of the annealed particles increases almost twice that may suggest the improvement of their ordering. The successful fabrication of ternary alloy particles may lead to the potential application of IBICVD for novel composite nanoparticles