MOEMS With Thin-Film Crystals

In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (ICs). In order to steer and accurately position a beam, we vary the high-frequency electric filed and light wavelength. Experimental, applied and fundamental results are reported.