A Reconfigurable RF MEMS Triple Stub Impedance Matching Network

This paper presents a reconfigurable triple stub impedance matching network using RF MEMS technology centered at 10GHz. The device is capable of covering impedances on the whole Smith Chart. The device structure consists of three variable length stubs which are designed as distributed MEMS transmission lines and two lambda
_g
/8 length CPW transmission lines connecting the stubs. The variable length stubs are implemented with 12 MEMS switches over CPW lines and CPW lines connecting the switches. lambda
_g
/8 spacing between the stubs is selected to obtain a uniform distribution of the impedance points on the Smith Chart. Initial measurement results of the fabricated structure show a good agreement with the simulation results