Optical Interconnection in CMOS IC with Optical Waveguide and Heterogeneous Integrated Opto-devices

In this paper, we have described the integration of all components necessary for an intra-chip optical interconnection: drive circuit, thin-film VCSEL, optical waveguide with 45degmirrors, thin-film photodetector (PD) and transimpedance amplifier (TIA) circuit on a CMOS IC chip. A data transmission between electrically isolated circuits via an intra-chip optical interconnection succeeded