Development of an Ultra-Small Angular Rate Sensor Element with a Laminated Quartz Tuning Fork

The authors have developed an ultra-small angular rate sensor element which was manufactured from a laminated quartz wafer. The quartz tuning fork sensor element (1.3 times 2.2 times 0.24 mm
³
) is so small that it can be applied to the 2.5 times 3.2 times 1.3 mm
³
surface mount type angular rate sensor. This ultra-small angular rate sensor element consisted of weighted longer arms and a winged base part for damper. According to the experimental result, it was confirmed that the scale factor was 0.67 mV/(deg/s), zero point voltage was 1.349 V and the maximum angular rate was plusmn 210 deg/s