Experimental determination of mass sensitivity of APM sensors by CVD thin films

Acoustic wave devices have been used as gravimetrical sensors in both gas and liquid environments. In case of corrosive analytes the use of acoustic plate modes (APMs) has proved to be a promising concept as sensor electrodes and analyte are strictly separated. While mass sensitivity of quartz microbalances and surface acoustic waves has been studied in detail both theoretically and experimentally, there are only few data on the mass sensitivity of APMs. In order to overcome this lack of information we determined the mass sensitivity of APMs on ZX-LiNbO
₃
using a chemical vapour deposition (CVD) method. Results are reported on the frequency dependence of mass sensitivity and the effects of metallization thickness and applied constant strain. The obtained data are compared to liquid-phase measurements