Monolithic quartz structure vibrating beam accelerometer (VBA)

This paper describes an accelerometer for which the vibrating beam sensor, the vibration isolation system, the proof mass, the proof mass suspension system, and the mounting means are all machined from a single rectangular quartz crystal blank. As such, this sensor represents a significant advancement in combining the sensor art with the quartz crystal resonator art. The design uses the well-known force-frequency modulation effect of a vibrating beam in axial tension or compression.<
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