Micro-machined three-dimensional micro-optics for integrated free-space optical system

Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining technology. Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated. The optical elements are precisely held at 90/spl deg/ angle to the substrate by side latches. The Si substrate serves as a "micro-optical bench" on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are constructed. The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging.<
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