CuInSe/sub 2/ solar cells by three source magnetron sputtering

Polycrystalline CuInSe/sub 2/ films were deposited by three source magnetron sputtering onto soda-lime glass and Mo-coated glass substrates at 250-500/spl deg/C. Almost no selenides on the erosion area of Cu and In targets were observed, which leads to good reproducibility of CuInSe/sub 2/ films. In-excess films which are suitable for solar cells were obtained even at relatively high substrate temperatures of 400-500/spl deg/C. The films showed excellent adhesion to the substrates and were grown with a preferential (112) orientation of chalcopyrite structure. The apparent grain size was approximately 0.5 /spl mu/m. No second phase material was observed in CuInSe/sub 2/ films with Cu/In ratios of 0.8-1.0. Preliminary solar cells with ZnO:Al/CdS/CuInSe/sub 2/ structure resulted in a conversion efficiency of 6.3% under AM1.5 illumination.<
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