In-situ monitoring and control for the growth of highly reproducible VCSEL structures

Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL).<
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