An application of a silica-on-terraced-silicon platform to hybrid Mach-Zehnder interferometric circuits consisting of silica-waveguides and LiNbO/sub 3/ phase-shifters

By using a silica-on-terraced-silicon platform (STS-platform) for optical hybrid integration, we fabricated a hybrid Mach-Zehnder interferometric circuit consisting of silica-waveguide directional couplers and a LiNbO/sub 3/ phase-shifter array. The circuit functioned as an optical switch with an insertion loss of 6.0 dB including input and output fiber coupling loss and an extinction ratio of better than 20 dB. The STS-platform was thus confirmed to incorporate both a high-performance planar lightwave circuit and a silicon optical bench.<
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