System integration of optical devices and analog CMOS amplifiers

Monolithic system integration of optical components, photodetectors, and analog transimpedance CMOS amplifiers is presented. An advanced SWAMI LOCOS technique, based on a submicron CMOS process is applied. Different optical devices including waveguides, beam splitters, interferometers and mirrors have been integrated using this technique. The optical system consists of a SiON layer deposited on 2-/spl mu/m oxide. The waveguides are made of structured SiO/sub 2/ layers on top of the SiON layer. Leaky wave or butt coupled photodiodes and phototransistors are used as light detectors. The photocurrents are amplified by low-noise CMOS transimpedance amplifiers with high sensitivity. They were designed for a large dynamic range of photocurrents together with short recovery times and low noise. Their reliability and yield were optimized with new CAD tools.<
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