0.25 /spl mu/m gate length CMOS devices for cryogenic operation

Under cryogenic operation, a low V/sub th/ realizes a high speed performance at a greatly reduced power-supply voltage, which is the most attractive feature of Cryo-CMOS. It is very important in sub-0.25 /spl mu/m Cryo-CMOS devices to reconcile the miniaturization and the low V/sub th/. Double implanted MOSFET's technology was employed to achieve the low V/sub th/ while maintaining the short channel effects immunity. We have investigated both the DC characteristics and the speed performance of 0.25 /spl mu/m gate length CMOS devices for cryogenic operation. The measured transconductances in the saturation region were 600 mS/mm for 0.2 /spl mu/m gate length n-MOSFET's and 310 mS/mm for 0.25 /spl mu/m gate length p-MOSFET's at 80 K. The propagation delay time in the fastest CMOS ring oscillator was 22.8 ps at V/sub dd/=1 V at 80 K. The high speed performance at extremely low power-supply voltages has been experimentally demonstrated. The speed analysis suggests that the sub-l0 ps switching of Cryo-CMOS devices will be realized by reducing the parasitic capacitances and through further miniaturization down to 0.1 /spl mu/m gate length or below.<
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