Limitations of electrical test information: a case study with polysilicon emitter contacts

It is shown in two case studies on polysilicon emitter contacts that electrical measurements are not sufficient on their own to understand observed variations in the devices under study. Combined with physical information from transmission electron microscopy (TEM) and secondary ion mass spectroscopy (SIMS) it is possible to see more clearly links between processing, structure, and electrical performance. Both interfacial oxide effects and emitter dose effects are discussed.<
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