Internal current probing of integrated circuits using magnetic force microscopy

A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.<
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